MKS 937B - Page 14

MKS 937B Operation Manual
14
CP 300 series stainless, nickel, glass, platinum
CM Inconel
®
FC 316 series stainless, nickel, Elgiloy
®
, Elastomer seal.
Internal volume
8
CC Series 421and 422 - 1.8 in
3
(30 cm
3
)
Series 423 - 0.9 in
3
(15 cm
3
)
HC Low power nude tube - zero
Mini BA - 1.4 in
3
(23 cm
3
)
Pirani 0.5 in
3
(8 cm
3
)
CP 2.0 in
3
(33 cm
3
)
CM Type 622A/623A/626A - 0.38 in.
3
(6.3 cm
3
)
Type 722A -0.3 in.
3
(4.9 cm
3
)
FC 0.27 in
3
(4.43 cm
3
)
Operating temperature range
CC Series 421 - 0° to 70°C (32° to158°F)
Series 422--Versions available that operate up to 250°C.
Series 423 - 0° to 70°C (32° to158°F)
Pirani & HC 0° to 50°C (32° to 122°F)
CP 10° to 50°C (50° to 122°F)
CM & FC 0° to 50°C (32° to 122°F)
Maximum bakeout temperature (Without controller or cables)
CC Series 421 – 250°C (482°F) when backshell subassembly
removed, 125°C (257°F) otherwise
Series 422 and 423 – 400°C (752°F) CF flange version only
with magnet removed
HC 60
o
C with cable attached
300
o
C max, with CF, cable removed
150
o
C, with KF and Viton
®
seal, cable removed
Pirani 50°C (122°F)
CP 100°C (212°F) RF shielded with coated plastic shell installed
150°C (302°F) Partial shell disassembly required
250°C RF shield via aluminum housing
CM & FC N/A
Radiation (<10
7
rad)
CC Series 422 with Lemo connector
CP 317 with aluminum housing
Hot cathode sensitivity
8
Volume will vary with the type of vacuum connection selected