Chapter 5: Process Interfaces
59
EN_GAS_CORRECTION 0:6 uint:1 0 = disabled, 1 = enabled
Reserved 0:7 uint:1
FLOW_SETPOINT 2:0 long in [FLOW_UNIT] in 10E-4 steps
valve switched off if setpoint < 1%
valve switched on if setpoint > 2%
If the device is in the analog mode (i.e. set point is taken from the analog interface) some functions
are not active:
1. VALVE_OVERRIDE is not active
2. EN_GAS_CORRECTION is not active
3. SELECT_GAS_TABLE is not active and the default table will be used
Small Receive Data
Small receive data
Name Add. Type Comment
HIGH_LIMIT_ALARM 1:0 uint:1 (flow > HIGH_LIMIT), Hysteresis = 0.5%
LOW_LIMIT_ALARM 1:1 uint:1 (flow < LOW_LIMIT) , Hysteresis = 0.5%
SYSTEM_ERROR 1:2 uint:1 any severe error condition
Reserved 1:3 uint:5
Reserved 0:0 uint:8
THERMAL_MASS_FLOW
_RATE
2:0 long in [FLOW_UNIT] in 10E-4 steps
INTERNAL_TEMP 6:0 long temperature in °C
VALVE_DRIVE_LEVEL 10:0 long 0 .. 100% (in 10E-4 steps)
0% = valve is closed
100% = valve is in purge position (full open)
Full Receive Data
Full receive data
Name Add. Type Comment
HIGH_LIMIT_ALARM 1:0 uint:1 (flow > HIGH_LIMIT), Hysteresis = 0.5% *
LOW_LIMIT_ALARM 1:1 uint:1 (flow < LOW_LIMIT) , Hysteresis = 0.5% *
SYSTEM_ERROR 1:2 uint:1 any severe system error condition
HIGH2_LIMIT_ALARM 1:3 uint:1 (flow > HIGH2_LIMIT), Hysteresis = 0.25%
LOW2_LIMIT_ALARM 1:4 uint:1 (flow < LOW2_LIMIT), Hysteresis = 0.25%
VALVE_CLOSED 1:5 uint:1 (THERMAL_MASS_FLOW_RATE < 1%) &&
(VALVE_OVERRIDE == FLOW_OFF)
PURGE 1:6 uint:1 THERMAL_MASS_FLOW_RATE > 110%
OVER_TEMPERATURE 1:7 uint:1 INTERNAL_TEMP > MAX_TEMP
VALVE_DRIVE_ALARM 0:0 uint:1 VALVE_DRIVE_LEVEL > MAX_VTP
CALIBRATION_
RECOMMENED
0:1 uint:1 TIME_TO_CAL count down expired
UNCALIBRATED 0:2 uint:1 if a disabled or no table is used
CONTROLLER_ERROR 0:3 uint:1 abs (setp - flow) greater for a longer time period
MEMORY_FAILURE 0:4 uint:1 E2PROM checksum error
UNEXPECTED_
CONDITION
0:5 uint:1 any process error condition
Reserved 0:6 uint:2
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