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MKS MF1 - Chapter 3: Installation and Start up; General Requirements; Environmental; Location and Orientation

MKS MF1
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Chapter 3: Installation
17
Chapter 3: Installation and Start Up
General Requirements
Environmental
Follow the guidelines below when installing and using your mass flow controller.
1. Maintain the normal operating temperature between 0 – 40°C (32° to 104°F).
2. Observe the pressure limits
Maximum gas inlet pressure is 10 bar (g).
Operational differential pressure is:
For F.S. of 10 to 5000 sccm
For F.S. of 10000 to 20000 sccm
0,7 bar (d) to 2.75 bar (d)
1 bar (d) to 2.75 bar (d)
The standard orifice is sized for control over this range with the outlet at atmospheric
pressure.
3. Two kinds of power supply are possible (applies to all units):
± 15 V
or
24 V (20 to 30 V)
Current: < 300 mA @ 24 VDC for Profibus, USB, RS485 or analog interface
4. Allow minimum 15 minutes for warm-up time for analog units as well as for units with
Profibus, RS 485 or USB interface.
5. Use high purity gas to purge the instrument.
6. The use of a filter upstream of the mass flow controller is recommended, if enough
pressure is available.
Refer also to Appendix A, Product Specifications for other possible precautions and restrictions.
Location and Orientation
1. Set the controller into position where it will be connected to a gas supply.
Placement of flow components in an orientation other than that in which they were
calibrated (typically horizontal) may cause a small zero shift. The zero offset can be
removed according to the instructions for zeroing.

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