Chapter 1: General Information
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Chapter 1: General Information
Introduction
MF1 is a state of the art high performance digital MFC with various options:
• Controller or meter version
• Metal or MEMS sensor versions
• Ranges from 10 sccm to 20 slm with various gases
• various fittings available
• PROFIBUS, Analog, RS 485, Ether CAT or USB Process Interface
Power Supply and Readout Units
The MF1 can be ordered as an analog version and thus can interface to complementary MKS
equipment which are available as single channel, dual channel, 4- and 8-channel units to display
the flow signal and to provide the power and set point commands. Refer to the corresponding
manuals for requirements and instructions.
Instruction Manual
Contents
This manual provides instructions on setup, installation, operation and service of:
• Mass flow controller MF1 analog operation
• Mass flow controller MF1 Profibus operation
• Mass flow controller MF1 RS485 operation
• Mass flow controller MF1 USB operation
• Mass flow controller MF1 EtherCAT operation
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