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MKS MF1 - Get Gas Table Index (G); Select Gas Table Index (G); Set Winkstatus (W)

MKS MF1
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Chapter 5: Process Interfaces
75
Set WinkStatus (W)
send:
W
Cmd not required
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]
Select Gas Table Index (G)
send:
G 0 0 0 0 0 0 1
Cmd Gas Table Index 0..14
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]
Get Gas Table Index (g)
send:
g
Cmd not required
receive:
g 0 0 0 0 0 0 1
Cmd Return the actual Gas Table Index

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