MKS MF1 User Manual

Appendix A: Specifications
105
Appendix A: Product Specifications
Specifications
Full Scale Ranges (nitrogen equivalent)
1
All metal sensor
MEMS sensor
10, 20, 50, 100, 200, 500, 1000, 2000, 5000,
10000, 20000 sccm
50, 100, 200, 500, 1000, 2000, 5000,
10000, 20000 sccm
Accuracy
2
(with calibration gas)
All metal sensor
MEMS sensor
± (0.5 % of reading plus 0.20 % of full scale)
TBD
Repeatability
All metal sensor
MEMS sensor
± 0.20 % of full scale
TBD
Resolution
All metal sensor
MEMS sensor
2.5 digits
TBD
Measurement (Dynamic) Range
All metal sensor
MEMS sensor
1 % to 100% of full scale
TBD
Control Range
All metal sensor
MEMS sensor
2.0 % to 100% of full scale
TBD
Controller Settling Time
3
All metal sensor
MEMS sensor
< 800 msec (350 msec on request)
TBD
Maximum Inlet Pressure 10 bar (g)
1
sccm = std. cm
3
/ min ; standard (std.) condition: 1013.25 mbar and 0 °C.
2
includes non-linearity, hysteresis and non-repeatability.
3
per SEMI E17-91

MKS MF1 Specifications

General

Brand	MKS
Model	MF1
Category	Controller
Language	English