MKS MF1 - Full Scale Range Sccm Nitrogen ) (Zzz)

Appendix B: Order Code
110
Propylene 69 C3H6
Silane 39 SiH4
Silicon Tetrachloride 108 SiCl4
Silicon Tetrafluoride 88 SiF4
Sulfur Dioxide 32 SO2
Sulfur Hexafluoride 110 SF6
Sulfuryl Fluoride 87 SO2F2
Tetrafluoroethane (R-134a) 156 C2H2F4
Titanium Tetrachloride 114 TiCl4
Trichlorofluoromethane (R-11) 91 CCl3F
Trichlorosilane 147 SiHCl3
Trichlorotrifluoroethane (R-113) 126 C2Cl3F3
Trifluoromethane (Fluoroform R-23) 49 CHF3
Tungsten Hexafluoride 121 WF6
Xenon 6 Xe
Full Scale Range (sccm Nitrogen) (ZZZ)
3
The full scale range is indicated by three digits.
Full scale flow range (sccm) Ordering code
10 11C or 101
20 21C or 201
50 51C or 501
100 12C or 102
200 22C or 202
500 52C or 502
1000 13C or 103
2000 23C or 203
5000 53C or 503
10.000 14C or 104
20.000
4
24C or 204
Full scale flow range (slm)
10 11L
20 21L
3
Max. 20000 sccm N2 equivalent, other gases on request.
4
Not in conjunction with FFKM seal material.