MKS MF1 - Page 109

Appendix B: Model Code
109
Carbonyl Sulfide 34 COS
Chlorine 19 Cl2
Chlorine Trifluoride 77 ClF3
Chlorodifluoromethane (R-22) 57 CHClF2
Chloroform (Trichloromethane) 71 CHCl3
Chloropentafluoroethane (R-115) 119 C2ClF5
Chlorotrifluoromethane (R-13) 74 CClF3
Cyclopropane 61 C3H6
Deuterium 14 D2
Diborane 58 B2H6
Dichlorodifluoromethane (R-12) 84 CCl2F2
Dichlorofluoromethane (R-21) 65 CHCl2F
Dichlorosilane 67 SiH2Cl2
1,2-Dichlorotetrafluoroethane (R-114) 125 C2Cl2F4
Disilane 97 Si2H6
Ethane 54 C2H6
Ethanol 136 C2H6O
Ethylene 38 C2H4
Ethylene Oxide 45 C2H4O
Fluorine 18 F2
Germane 43 GeH4
Germanium Tetrachloride 113 GeCl4
Helium 1 He
Hexafluoroethane (R-116) 118 C2F6
Hexafluoropropylene 138 C3F6
Hexane 127 C6H14
Hydrogen 7 H2
Hydrogen Bromide 10 HBr
Hydrogen Chloride 11 HCl
Hydrogen Fluoride 12 HF
Hydrogen Selenide 23 H2Se
Hydrogen Sulfide 22 H2S
Isobutane 111 C4H10
Isobutylene 106 C4H8
Krypton 5 Kr
Methane 28 CH4
Neon 2 Ne
Nitric Oxide 16 NO
Nitrogen 13 N2
Nitrogen Dioxide 26 NO2
Nitrogen Trifluoride 53 NF3
Nitrous Oxide 27 N2O
Octafluorocyclobutane (R-c318) 129 C4F8
Oxygen 15 O2
Ozone 30 O3
Phosgene 60 CCl2O
Phosphine 31 PH3
Phosphorous Oxychloride 102 POCl3
Propane 89 C3H8