Chapter 8: Maintenance
101
Chapter 8: Maintenance
General
After proper installation and correct setup there is typically only the need for occasionally checking
and - if necessary - readjusting the zero flow signal. In general no further maintenance is required.
How often the calibration and the valve should be checked depends on physical influences, e.g.
temperature, vibrations, dust etc., is also related to the required accuracy and last not least on how
the process gas affects the wetted parts inside the unit.
If a controller fails to operate properly upon receipt, check for shipping damage, and check the
power/signal cable for correct continuity. Any damage should be reported to the carrier and MKS
Instruments immediately.
Zero Adjustment
To achieve optimum accuracy and reliability you should periodically check the zero readout and - if
necessary - readjusting it.
Checks and Recalibration
Checks and recalibrations can be done by any service center of MKS (refer to section Repair). If
nothing else is specified or shorter intervals are necessary we recommend annual maintenance
and recalibration at a service center of MKS.
MKS offers many standard equipment for checking and calibrating mass flow meters / controllers
to allow you making all testing and calibration even in situ.
For electronic testing and trouble shooting we recommend to do all measurements directly at the
interface connector of the unit. This eliminates or detects erratic diagnosis, typically generated by
incorrect grounding. MKS offers for this purpose so called breakout connectors. These are
switched between the connector of the unit and the cable and provide a test pin for each wire, thus
allowing direct access for a volt meter or oscilloscope etc.
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