MKS MF1 - Small Diagnostics (for DPV0 Only)

Chapter 5: Process Interfaces
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USER_ZERO 7:0 long -5% .. +5% full scale (1E-4 steps)
HIGH_TRIP_POINT 11:0 long -10% .. +120% full scale (1E-4 steps)
LOW_TRIP_POINT 15:0 long -10% .. +120% full scale (1E-4 steps)
GAS_CORRECTION 19:0 long 0.05 .. 2.00 (in 1E-4 steps)
DEFAULT_TABLE 23:0 uint8:4 0 .. 14 is the default table,
15 function (y=x) is the gas table
Reserved 23:4 uint8:4
HIGH2_TRIP_POINT 24:0 long -10% .. +120% full scale (1E-4 steps)
LOW2_TRIP_POINT 28:0 long -10% .. +120% full scale (1E-4 steps)
FILTER_SETTLING 32:0 long 0.0 .. 1000.0 in [sec] (in 1E-4 steps)
SOFT_START_RATE 36:0 long 0.0 .. 3600.0 in [sec] (in 1E-4 steps)
TIME_TO_CAL 40:0 uint16 if SET_TIME_TO_CAL is 1 it will last
TIME_TO_CAL hours until
CALIBRATION_RECOMMENDED flag becomes
active.
CAL_DATE 42:0 char[6] MM/DD/YY
USER_TAG 48:0 chr[32] any 32 character string
Small Diagnostics (for DPV0 only)
small diagnostics
Name Add. Type Comment
STRUCT_ID 0:0 uint8 0x20 (SMALL_DIAG)
Exception Status
ALARM_DEVICE_
COMMON
1:0 uint:1 specific to network (e.g. power fail)
ALARM_DEVICE_
SPECIFIC
1:1 uint:1 specific to flow device (e.g. r/w EPROM)
ALARM_MKS_SPECIFIC 1:2 uint:1 specific to MKS
ALARM_TABLE_ERROR 1:3 uint:1 Reports cal. Table errors
Reserved 1:4 uint:4
Identification:
PRODUCT_CODE 2:0 uint16 1179
REVISION_CODE 4:0 uint8 0x01
VERSION_CODE 5:0 uint16 0x0100
Specification:
FULL_SCALE_RNG 7:0 long full scale range in [FLOW_UNIT] (in 1E-4 steps)
FLOW_UNIT 11:0 uint8 SCCM, SLM (SCCM is base unit)
Status:
INTERNAL_TEMP 12:0 long temperature in °C
VALVE_DRIVE_LEVEL 16:0 long 0 .. 100% (in 10E-4 steps)
RUN_HOURS 20:0 uint16 hours