MKS MF1 - Get Device Status (D); Get MF1 Error Status (M)

Chapter 5: Process Interface
76
Get Device Status (D)
send:
D
Cmd not required
receive:
D HL1 LL1 HL2 LL2 VCL PUG CAL
Status Messages
0 => not occurred
1 => occurred
HL1 High Limit Alarm 1
LL1 Low Limit Alarm 1
HL2 High Limit Alarm 2
LL2 Low Limit Alarm 2
VCL Valve Closed
PUG Purge
Cmd
CAL Calibration is Recomended
Get MF1 Error Status (M)
send:
M
Cmd not required
receive:
M SYE OVT VDA UNC COE MEF UEC
Error Messages
0 => not occurred
1 => occurred
SYE System Error
OVT Over Temperature
VDA Valve Drive Alarm
UNC Uncalibrated
COE Controller Error
MEF Memory Failure
Cmd
UEC Unexpected Condition