MKS MF1 - Environmental Specifications; Electrical Specifications

Appendix A: Specifications
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Operating Differential Pressure (MFC only)
5
10 to 5000 sccm
10000 to 20000 sccm
0.7 bar (g) to 2.75 bar (g)
1 bar (g) to 2.75 bar (g)
Pressure Coefficient < 0.02 % of reading/psi
Operating Temperature Range 0 – 40 °C
Temperature Coefficient on Zero
All metal sensor
MEMS sensor
< 0.04 % of full scale /°C (400 ppm)
TBD
Temperature Coefficient on Span
All metal sensor
MEMS sensor
< 0.08 % of reading /°C
TBD
Warm Up Time ca. 15 min
Environmental specifications
Storage Humidity Range 0 to 95 % relative humidity, non-condensing
Storage Temperature Range -20 to 50°C
Electrical Specifications
Connectors:
Power
USB Setup Interface
Analog Process Interface
Profibus Process Interface
RS 485/ Modbus Process Interface
USB Process Interface
EtherCAT
Phoenix MC-series, 3.81 pitch
micro-B
Sub D 9-poles, pin
Sub D 9-poles, socket
Sub D 9-poles, socket
B
2 x RJ45
Supply Voltage/Current Required
Maximum supply current
Maximum idle current
± 15 V or + 24 V (20 to 30 V)
300 mA @ + 24 V
100 mA @ + 24 V (for USB, Analog, RS 485 and
Profibus interfaces)
5
Referenced to an MFC outlet at atmosphere