Chapter 2 : Shipment
16
Label
The label shows the following information: See figure 1 as an example:
Model code MF1
Sealing FKM
Range 500 sccm
Gas type SiH4 (the range is related to this gas)
Serial number 454145G20
CE mark CE
Manufacturer MKS Instruments Deutschland GmbH
500 sccm / SiH4
MF1C039502RPV
SN:454145G20
MKS Instruments Deutschland GmbH
Figure 1 Model Code Label
Across the housing and the meter/controller body there is a warranty void sticker to avoid access
to the inside by unauthorized people. Broken or removed label means lost of any warranty.
Clean Room Packaging
It is possible to get the flow controller delivered in clean room packaging (as an option). When
unpacking, follow these steps:
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2. Wipe down the exterior of the inner bag with a clean room wipe.
This step reduces the contamination introduced into the clean room.
3. Remove the inner bag in the clean room.
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