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MKS MF1 - Electrical Connections and Cables; Cables; Power Supply; Readout Units of Other Manufacturers; Non MKS Cables

MKS MF1
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Chapter 3: Installation
22
Electrical Connections and Cables
The units comply with the European standards and thus they are labeled with the CE-mark. To
fulfill the above listed guidelines it is mandatory to use the appropriate interconnection cables.
Note
EMC Directive Requirements according to 2004/108/EC:
The instrument complies to EN 61326-2-2 with the requirements for
industrial applications. Braided shielded cables must be used.
We recommend to use the cables offered by MKS Instruments.
Cables which are in compliance with the CE guidelines are marked with
an „E“ or „S“ (example: CB259E-... or CB259S-...).
The PROFIBUS cable must be qualified.
Cables
See for detailed information the section of the Process Interfaces.
Power Supply / Readout Units of other Manufacturers
Should you use power supplies / readout units of manufacturers other than MKS then make sure
that these units fulfill the electrical specifications for use with the mass flow controllers/meters as
described herein. Refer to Appendix A, Product Specifications.
Non MKS Cables
Requirements
Should you choose to manufacture your own cables, follow the guidelines listed below:
1. The cable must have a braided
shield, covering all wires. Neither aluminum foil nor
spiral shielding will be as effective: using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cable’s shield on
the whole circumference of the cable.
3. With very few exceptions, the connector(s) must make good contact (typical 0,01Ω or less)
to the device’s case (ground). The case also must be properly grounded.
4. When selecting the cable, consider:
a) The voltage ratings.
b) The cumulative I
2
R heating of all the conductors (keep them safely cool).
c) The voltage drop of the conductors, so that adequate power or signal voltage gets to
the device.
d) The capacitance and inductance of cables which are handling fast signals
e) If there are specific requirements when supply units etc of other manufacturers are
used

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