MKS MF1 - Mass Flow Rate at a Different Reference Temperature

Chapter 6: Gas Correction Factor (GCF)
97
Mass Flow Rate at a Different Reference Temperature
The equations for calculating the GCF assume that the MFC was calibrated at a reference
temperature of 0° C (~273.15 K). If you want to read the mass flow as if the MFC was calibrated at
a different reference temperature, adjust the calculated GCF value using the following equation:
GCF
X
N
x
T
T
x GCF =
where:
T
x
= actual reference temperature in Kelvin K
T
N
= international standard temperature 273.15 K ( = 0° C)
Note
All MKS readouts have gas correction adjustment controls to provide
direct readout. The analog setpoint output signal is generated
accordingly.