MKS MF1 - Calibration Table (for DPV0 Only); Diagnosis (for DPV1 Only)

Chapter 5: Process Interfaces
63
Calibration Table (for DPV0 only)
Calibration table
Name Add. Type Comment
STRUCT_ID 0:0 uint8 0x12 or 0x22 for diagnosis
GAS_TABLE_IDX 1:0 uint8 0..14
GAS_CODE 2:0 uint8 0..254
255 resets to factory setup
POINT_NUM 3:0 uint8 2..15 = table with 2 .. 15 points
0 = disables table
1 = enables table
GAS_NAME 4:0 char[16] e.g. N2
SENSOR_VALS 20:0 long[15] in [FLOW_UNIT] in 10E-4 steps
FLOW_VALS 80:0 long[15] in [FLOW_UNIT] in 10E-4 steps
If a table is loaded, which is not strict monotonous, the table will be disabled (POINT_NUM = 0). If
a table, with a not valid index, is loaded, no tables will be affected. In both case the error flag for
the table will be set.
The calibration tables convert the measured value (SENSOR_VALS) to the true physical value
(FLOW_VALS). If the actual measured value is between two SENSOR_VALS, the flow will be
calculated by linear interpolation. If the measured value is outside of the table definitions, the first
(last) straight line will be continued.
The GAS_CODE may be any definition for gases. It is not evaluated. The GAS_NAME may be any
16 character string. It is also not evaluated.
The calibration tables stored from the factory may be recalled by an GAS_CODE of 255. In this
case the TABLE_FLAG in the full diagnostic is reset.
Diagnosis (for DPV1 only)
Diagnosis
Name Add. Type Comment
CommonExceptionDetailAlarm 0:0 uint8 see Status - CommonExceptionDetailAlarm
DeviceExceptionDetailAlarm 1:0 uint8 see Status - DeviceExceptionDetailAlarm
ManufacturerExceptionDetailAl
arm
2:0 uint8 see Status - ManufacturerExceptionDetailAlarm
CommonExceptionDetailWarn 3:0 uint8 see Status - CommonExceptionDetailWarn
DeviceExceptionDetailWarn 4:0 uint8 see Status - DeviceExceptionDetailWarn
ManufacturerExceptionDetailW
arn
5:0 uint8
see Status - ManufacturerExceptionDetailWarn