MKS MF1 - Physical Specifications

Appendix A: Specifications
107
Output Signal, analog
Default setup: 0- 5 VDC;
Configurable: Zero: 0 to 2 VDC
F.S.: 5 to 10 VDC
Set Point Command Signal, analog
default setup: 0 - 5 VDC;
Configurable (= Output Signal setting):
Zero: 0 to 2 VDC
F.S.: 5 to 10 VDC
Physical Specifications
Dimensions refer to Figure 2
Fittings:
Standard
Optional
Cajon
®
4-VCR
®
male compatible
Cajon
®
4-VCO
®
male compatible
1/4“ Swagelok compatible
DN 16 KF
MKS Surface Mount
Leak Integrity (mbar·l/s He)
External
Through closed Valve (MFC only)
< 1 x 10
-9
< 1 x 10
-5
Materials Wetted
All Metal Sensor:
Mass Flow Controller:
Optional seals and valve seal
MEMS Sensor:
1.4301 SST, FKM , Nickel
NBR, FFKM
TBD
Mass ca. 0.7 kg
Due to continuing research and development activities, these product specifications are subject to change without notice.