MKS MF1 - Get Flow Setpoint (S); Get Temperature (T); Get Valve Drive Level (V); Set Flow Setpoint, Get Actual Flow (S)

Chapter 5: Process Interfaces
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Get Temperature (T)
send:
T
Cmd not required
receive:
T 1 . 0 0 0 0 0
Cmd Internal Temperature [°C]
Get Valve Drive Level (V)
send:
V
Cmd not required
receive:
V 1 . 0 0 0 0 0
Cmd Valve Drive Level [%]
Set Flow Setpoint, Get Actual Flow (S)
send:
S 1 . 0 0 0 0 0
Cmd Setpoint [calibrated flow unit e.g. sccm]
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]
Get Flow Setpoint (s)
send:
s
Cmd not required
receive:
s 1 . 0 0 0 0 0
Cmd Get the actual setpoint