MKS MF1 User Manual

Mass Flow Controller Safety Information
9
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like, which, if
not correctly performed or adhered to, could result in injury to
personnel.
Caution
The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

MKS MF1 Specifications

General

Brand	MKS
Model	MF1
Category	Controller
Language	English