MKS MF1 - Cables and Controllers by MKS; Power Supply; Operation; Configuration

Chapter 5: Process Interfaces
65
Analog Interface
Pin-7: SIG_GND Signal ground
Pin-8: [reserved] reserved
Pin-9: [reserved] reserved
Table 5 Analog Interface
Power supply
The MF1 could be powered via the Phönix MC-Series connector below the Zero switch or via the
Sub D connector. Therefore a mating connector is included in the delivery. For the correct power
supply specification see the technical specification in Appendix A. The Pin 5 of the 9 Pin Sub D
connector is connected with the Phönix connector Pin “-“. If the Phönix connector is used for power
supply the Pin 5 of the Sub D connector must not be connected and vice versa.
Cables and Controllers by MKS
MKS Controller Number of provided Channels MKS Cable
PR4000B 1 or 2 CBE147-12-3M
247D 4 CBE147-12-3M
647C 4 or 8 CBE147-12-3M
Table 6 MKS Controller and cables for analog MF1 units
Operation
Configuration
The analog version of the MF1 could be configured via the USB Setup Interface. See for details
Chapter 4.
Feedback and Diagnostic
LED Functions
LED Signals
Off No power or not initialized
Green Initialized
Flashing green Initialized, diagnostic events present
ST
Red Exception error
Off No flow
Flashing blue Flow Indicator: Flashes proportional to actual flow
FL
Blue on 100% Flow