MKS MF1 - Full Diagnostics (for DPV0 Only)

Chapter 5: Process Interface
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Full Diagnostics (for DPV0 only)
Full diagnostics
Name Add. Type Comment
STRUCT_ID 0:0 uint8 0x21 (SMALL_DIAG)
ALARM_DEVICE_
COMMON
1:0 uint:1 specific to network (e.g. power fail)
ALARM_DEVICE_
SPECIFIC
1:1 uint:1 specific to flow device (e.g. r/w EPROM)
ALARM_MKS_SPECIFIC 1:2 uint:1 specific to MKS (LinTab error)
ALARM_TABLE_ERROR 1:3 uint:1 Reports cal. Table errors
Reserved 1:4 uint:4
PRODUCT_CODE 2:0 uint16 1179
REVISION_CODE 4:0 uint8 0x01
VERSION_CODE 5:0 uint16 0x0100
FULL_SCALE_RNG 7:0 long full scale range in [FLOW_UNIT] (in 1E-4 steps)
FLOW_UNIT 11:0 uint8 SCCM, SLM
INTERNAL_TEMP 12:0 long temperature in °C
VALVE_DRIVE_LEVEL 16:0 long 0 .. 100% (in 10E-4 steps)
RUN_HOURS 20:0 uint16 hours
MANUFACTURER 22:0 char[20] MKS INSTRUMENTS
MODEL_DESIGNATION 42:0 char[20] MF1C01313CM1BV0
SERIAL_NUMBER 62:0 char[20] 999999 G
DEVICE_TYPE 82:0 char[6] MFC, MFM
MODEL_TYPE 88:0 char[6] MF1
FIRMWARE_REVISION 94:0 char[6] 1.01
HARDWARE_REVISION 100:0 char[6] A
FACTORY_CAL_DATE 106:0 char[6] MM/DD/YY
VENDOR_CODE 112:0 uint16 0
STANDARD_TEMP 114:0 long 273.0 K ( 0 °C)
STANDARD_PRESSURE 118:0 long 101.3kPa (in 10E-4 steps)
VALVE_TYPE 122:0 uint8 0=SOLENOID, 1=VOICE_COIL,
2=PIEZO_ELECTRIC
VALVE_POWER_OFF_
MODE
123:0 uint8 0=CLOSED, 1=OPEN, 2=LAST_POS
GAS_TABLE_NUM 124:0 uint8 Number of gas tables programmed.
i.e. values != 0 in GAS_CODE_OF_TABLE_I
GAS_CODE_OF_
TABLE_I
125:0 uint8[15] gas code of gas tables
0=no table (y=x)
POINT_NUM_OF_
TABLE_I
140:0 uint8[15] Point number of gas tables
TABLE_FLAGS 155:0 uint:1[15] 0=FACTORY; 1=USER; 1 means that the user
has overwritten the gas table once. All these flags
will be reset at factory setup.
ACTIVE_GAS_NAME 157:0 char[16] e.g. N2, is name of DEFAULT_TABLE if there
was no cyclic comm. In the past.
CAL_DATE 173:0 char[6] MM/DD/YY
USER_TAG 179:0 char[32] any 32 character string
REM_TIME_TO_CAL 211:0 uint16 Remaining TIME_TO_CAL
FLOW_TOTALIZED 213:0 long in sl/sm3 (in 10E-4 steps)
i.e. min. 298 days for a 500 range.
No base unit feature.