MKS MF1 - Full Setup; Small Setup

Chapter 5: Process Interface
60
THERMAL_MASS_FLOW
_RATE
2:0 long in [FLOW_UNIT] in 10E-4 steps
INTERNAL_TEMP 6:0 long temperature in ° C
VALVE_DRIVE_LEVEL 10:0 long 0 .. 100% (in 10E-4 steps)
0% = valve is closed
100% = valve is in purge position (full open)
FLOW_TOTALIZED 14:0 long in sl / sm3 (in 10E-4 steps)
i.e. min. 298 days for a 500 range.
*) Hysteresis is +/- 0.25% (i.e. 0.5% in total) based on actual limit
Small Setup
Small setup
Name Add. Type Comment
STRUCT_ID 0:0 uint8 0x10 (SMALL_SETUP)
INITIAL_SETUP 2:0 uint:1 THIS, ROM
BASE_UNIT 2:1 uint:1 Display in base unit
OPERATION_MODE 2:2 uint:1 0=ANALOG, 1=PROFIBUS
Reserved 2:3 uint:5
Reserved 1:0 uint:8
USER_SPAN 3:0 long 5% .. 200% in [%] (in 1E-4 steps)
USER_ZERO 7:0 long -5% .. +5% of full scale (in 1E-4 steps)
HIGH_TRIP_POINT 11:0 long -10% .. +120% of full scale (in 1E-4 steps)
LOW_TRIP_POINT 15:0 long -10% .. +120% of full scale (in 1E-4 steps)
Full Setup
Full setup
Name Add. Type Comment
STRUCT_ID 0:0 uint8 0x11 (FULL_SETUP)
INITIAL_SETUP 2:0 uint:1 THIS, ROM
BASE_UNIT 2:1 uint:1 display in base unit
OPERATION_MODE 2:2 uint:1 0=ANALOG, 1=PROFIBUS
SET_USER_SPAN 2:3 uint:1 1=USER_SPAN will be updated
SET_USER_ZERO 2:4 uint:1 1=USER_ZERO will be updated
SET_HIGH_TRIP_POIN
T
2:5 uint:1 1=HIGH_TRIP_POINT will be updated
SET_LOW_TRIP_POIN
T
2:6 uint:1 1=LOW_TRIP_POINT will be updated
SET_GAS_CORRECTI
ON
1:7 uint:1 1=GAS_CORRECTION will be updated
SET_DEFAULT_TABLE 1:0 uint:1 1=DEFAULT_TABLE will be updated
SET_HIGH2_TRIP_POI
NT
1:1 uint:1 1=HIGH2_TRIP_POINT will be updated
SET_LOW2_TRIP_POI
NT
1:2 uint:1 1=LOW2_TRIP_POINT will be updated
SET_FILTER_SETTLIN
G
1:3 uint:1 1=FILTER_SETTLING will be updated
SET_SOFT_START_RA
TE
1:4 uint:1 1=SOFT_START_RATE will be updated
SET_TIME_TO_CAL 1:5 uint:1 1=TIME_TO_CAL will be updated
SET_CAL_DATE 1:6 uint:1 1=CAL_DATE will be updated
SET_USER_TAG 1:7 uint:1 1=USER_TAG will be updated
USER_SPAN 3:0 long 5% .. 200% in [%] (in 1E-4 steps)