Chapter 1: General Information
14
Conventions
If not explicitly expressed differently at the respective place in this handbook all data are
referenced to:
a) Temperature in °C
b) Gas type is nitrogen N2
c) Pressure in mbar or bar with index (a) relates to absolute pressure and whereas index (g)
stands for gauge pressure, related to atmospheric and index (d) indicates differential
pressure.
d) Flow rates are given in sccm
**
or slm
***
related to nitrogen or dry air.
**
1 sccm = 1 standard cm
3
/ min ; Standard conditions: 1013.25 mbar and 0 °C
***
1 slm = 1 standard liter / min = 1000 sccm
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