MKS MF1 User Manual

Table of Contents
iii
Table of Contents
MASS FLOW CONTROLLER SAFETY INFORMATION...................................................................... 9
SYMBOLS USED IN THIS INSTRUCTION MANUAL............................................................................................ 9
SAFETY PROCEDURES AND PRECAUTIONS.................................................................................................... 10
CHAPTER 1: GENERAL INFORMATION............................................................................................. 13
INTRODUCTION............................................................................................................................................. 13
Power Supply and Readout Units............................................................................................................ 13
INSTRUCTION MANUAL................................................................................................................................13
Contents................................................................................................................................................... 13
Conventions............................................................................................................................................. 14
CHAPTER 2: SHIPMENT.......................................................................................................................... 15
GENERAL ..................................................................................................................................................... 15
Unpacking ............................................................................................................................................... 15
UNPACKING CHECKLIST............................................................................................................................... 15
Optional Accessories:.............................................................................................................................. 15
Label........................................................................................................................................................ 16
Clean Room Packaging........................................................................................................................... 16
CHAPTER 3: INSTALLATION AND START UP .................................................................................. 17
GENERAL REQUIREMENTS............................................................................................................................ 17
Environmental ......................................................................................................................................... 17
Location and Orientation........................................................................................................................ 17
Leak Integrity .......................................................................................................................................... 19
Pressure Drop Test.................................................................................................................................. 19
DIMENSIONS................................................................................................................................................. 19
ELECTRICAL CONNECTIONS AND CABLES .................................................................................................... 22
Cables...................................................................................................................................................... 22
Power Supply / Readout Units of other Manufacturers .......................................................................... 22
Non MKS Cables ..................................................................................................................................... 22
FINISHING THE INSTALLATION...................................................................................................................... 23
START UP THE MASS FLOW CONTROLLER/METER....................................................................................... 24
ZERO ADJUST............................................................................................................................................... 24
ZERO BUTTON.............................................................................................................................................. 25
CHAPTER 4: USB SETUP INTERFACE.................................................................................................27
GENERAL ..................................................................................................................................................... 27
INSTALLATION ............................................................................................................................................. 27
Electrical connection: ............................................................................................................................. 27
Cable:...................................................................................................................................................... 27
OPERATION .................................................................................................................................................. 27
Address.................................................................................................................................................... 27
Configuration .......................................................................................................................................... 28
MSD-Mode .............................................................................................................................................. 28
PROTOCOLL.................................................................................................................................................. 28
General Description................................................................................................................................ 28
Default settings........................................................................................................................................ 29
Objects..................................................................................................................................................... 29
Object Model........................................................................................................................................................ 29
Object Reference .................................................................................................................................................. 29
Object Parameters Description ............................................................................................................................. 29
Object Parameter Reference ................................................................................................................................. 40
CHAPTER 5 PROCESS INTERFACES ....................................................................................................53

MKS MF1 Specifications

General

Brand	MKS
Model	MF1
Category	Controller
Language	English