MKS MF1 - Set Autozero (A); Set Valve Override Close (C); Set Valve Override Normal (N); Set Valve Override Purge (P)

Chapter 5: Process Interface
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Set Valve Override Normal (N)
send:
N
Cmd not required
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]
Set Valve Override Close (C)
send:
C
Cmd not required
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]
Set Valve Override Purge (P)
send:
P
Cmd not required
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]
Set Autozero (A)
send:
A
Cmd not required
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]