MKS MF1 - Command List Description; Command Reference List; Get Actual Flow (F)

Chapter 5: Process Interface
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End: Protocol end character CR (hex: 0x13)
Command Reference List
This next table shows the commands with the dedicated return cmd values.
The communication is process optimized. For every command where an acknowledge is not
necessary the MF1 returns the actual flow value (F) as acknowledge. Only if the command can not
be executed or an error occurred the MF1 sends an error message (E). So in normal mode it is
guaranteed that the application receives the actual flow in every cyclic step.
Cmd Description Return Cmd
F
Get Actual Flow
F
T
Get Temperature
T
V
Get Valve Drive Level
V
S
Set Flow Setpoint, Get Actual Flow
F
s
Get Flow Setpoint
s
N
Set Valve Override Normal
F
C
Set Valve Override Close
F
P
Set Valve Override Purge
F
A
Set Autozero
F
W
Set WinkStatus
F
G
Select Gas Table Index
F
g
Get Gas Table Index
g
D
Get Device Status
D
M
Get MF1 Error Status
M
U/u
Get Communication Status
U
E
Error Telegram
E
Command list description
Get Actual Flow (F)
send:
F
Cmd not required
receive:
F 1 . 0 0 0 0 0
Cmd Actual Flow [calibrated flow unit e.g. sccm]