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MKS MF1 User Manual

MKS MF1
117 pages
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Table of Contents
iv
F
UNCTIONS ...................................................................................................................................................53
Report Functions......................................................................................................................................53
Valve Override.........................................................................................................................................53
Auto Zero .................................................................................................................................................53
Alarm Limits.............................................................................................................................................53
Temperature Measurement ......................................................................................................................53
Valve Drive Level.....................................................................................................................................54
User Span / Gas Correction.....................................................................................................................54
User Zero .................................................................................................................................................54
Filter ........................................................................................................................................................54
Gas Tables ...............................................................................................................................................54
Soft Start Rate ..........................................................................................................................................54
PROFIBUS PROCESS INTERFACE.................................................................................................................55
Installation...............................................................................................................................................55
Pinout....................................................................................................................................................................55
Power supply......................................................................................................................................................... 55
Cable..................................................................................................................................................................... 56
Operation.................................................................................................................................................57
Address ................................................................................................................................................................. 57
Configuration (GSD).............................................................................................................................................57
Feedback and Diagnostics.......................................................................................................................57
Error codes............................................................................................................................................................57
LED Functions......................................................................................................................................................57
Protocol (PROFIBUS cyclic telegrams)..................................................................................................58
Data Interface........................................................................................................................................................ 58
Send Data.............................................................................................................................................................. 58
Small Receive Data............................................................................................................................................... 59
Full Receive Data.................................................................................................................................................. 59
Small Setup........................................................................................................................................................... 60
Full Setup.............................................................................................................................................................. 60
Small Diagnostics (for DPV0 only) ...................................................................................................................... 61
Full Diagnostics (for DPV0 only)......................................................................................................................... 62
Calibration Table (for DPV0 only) ....................................................................................................................... 63
Diagnosis (for DPV1 only) ................................................................................................................................... 63
ANALOG PROCESS INTERFACE......................................................................................................................64
Functions..................................................................................................................................................64
Valve Override...................................................................................................................................................... 64
Scaling the Signal ................................................................................................................................................. 64
Installation...............................................................................................................................................64
Pinout....................................................................................................................................................................64
Power supply......................................................................................................................................................... 65
Cables and Controllers by MKS ........................................................................................................................... 65
Operation.................................................................................................................................................65
Configuration........................................................................................................................................................ 65
Feedback and Diagnostic ........................................................................................................................65
LED Functions......................................................................................................................................................65
RS485 AND USB INTERFACES ......................................................................................................................66
Installation...............................................................................................................................................66
Pinout....................................................................................................................................................................66
Power supply......................................................................................................................................................... 66
Cable for RS485.................................................................................................................................................... 67
Cable for USB....................................................................................................................................................... 67
Operation.................................................................................................................................................67
Address ................................................................................................................................................................. 67
Configuration........................................................................................................................................................ 67
Feedback and Diagnostics.......................................................................................................................70
Error Codes........................................................................................................................................................... 70
LED Functions......................................................................................................................................................70
Protocol (“Human Readable Protocol”).................................................................................................71

Table of Contents

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MKS MF1 Specifications

General IconGeneral
BrandMKS
ModelMF1
CategoryController
LanguageEnglish

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