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MKS MF1 User Manual

MKS MF1
117 pages
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Table of Contents
v
Send telegram.......................................................................................................................................... 71
Receive telegram .................................................................................................................................................. 71
Command Reference List......................................................................................................................... 72
Command list description........................................................................................................................ 72
Get Actual Flow (F).............................................................................................................................................. 72
Get Temperature (T)............................................................................................................................................. 73
Get Valve Drive Level (V) ................................................................................................................................... 73
Set Flow Setpoint, Get Actual Flow (S)................................................................................................................ 73
Get Flow Setpoint (s)............................................................................................................................................ 73
Set Valve Override Normal (N)............................................................................................................................ 74
Set Valve Override Close (C)............................................................................................................................... 74
Set Valve Override Purge (P) ............................................................................................................................... 74
Set Autozero (A)................................................................................................................................................... 74
Set WinkStatus (W).............................................................................................................................................. 75
Select Gas Table Index (G)...................................................................................................................... 75
Get Gas Table Index (g)........................................................................................................................................ 75
Get Device Status (D)........................................................................................................................................... 76
Get MF1 Error Status (M)..................................................................................................................................... 76
Get Communication Status (U or u) ..................................................................................................................... 77
MODBUS INTERFACE.................................................................................................................................... 78
Installation .............................................................................................................................................. 78
Pinout.................................................................................................................................................................... 78
Power.................................................................................................................................................................... 79
Cable..................................................................................................................................................................... 79
Operation ................................................................................................................................................ 80
Address................................................................................................................................................................. 80
MODBUS compatible addressing description...................................................................................................... 80
Configuration........................................................................................................................................................ 80
Feedback and Diagnostics ...................................................................................................................... 82
Error Codes........................................................................................................................................................... 82
LED Functions...................................................................................................................................................... 82
Protocol (Modbus compatible)................................................................................................................ 83
Holding Registers ................................................................................................................................................. 83
Coils...................................................................................................................................................................... 83
Input Registers...................................................................................................................................................... 84
Discrete Inputs...................................................................................................................................................... 85
ETHERCAT.................................................................................................................................................. 87
Installation .............................................................................................................................................. 87
Pinout.................................................................................................................................................................... 87
Power supply ........................................................................................................................................................ 87
Cable..................................................................................................................................................................... 87
Operation ................................................................................................................................................ 88
Address................................................................................................................................................................. 88
Feedback and Diagnostics ...................................................................................................................... 88
Error Code ............................................................................................................................................................ 88
LED functions....................................................................................................................................................... 88
Protocol................................................................................................................................................... 89
Process Data Objects (PDO) protocol................................................................................................................... 89
CAN application layer over EtherCAT (CoE) - Objects....................................................................................... 90
CHAPTER 6: GAS CORRECTION FACTOR (GCF) ............................................................................ 94
THE GAS CORRECTION FACTOR (GCF):....................................................................................................... 94
How To Calculate the GCF for Pure Gases............................................................................................ 94
How To Calculate the GCF for Gas Mixtures......................................................................................... 95
Note ...................................................................................................................................................................... 95
Example................................................................................................................................................... 96
Mass Flow Rate at a Different Reference Temperature.......................................................................... 97
CHAPTER 7: THEORY OF OPERATION.............................................................................................. 98

Table of Contents

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MKS MF1 Specifications

General IconGeneral
BrandMKS
ModelMF1
CategoryController
LanguageEnglish

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