MKS MF1 User Manual

Table of Contents
vi
T
ECHNIQUE OF MEASUREMENT AND CONTROL, ELECTRONICS.....................................................................98
Flow Path.................................................................................................................................................99
Measurement Technique ..........................................................................................................................99
Control Circuitry......................................................................................................................................99
CONTROL VALVE........................................................................................................................................100
CHAPTER 8: MAINTENANCE...............................................................................................................101
GENERAL ....................................................................................................................................................101
Zero Adjustment.....................................................................................................................................101
Checks and Recalibration......................................................................................................................101
Profibus Support Kit ..............................................................................................................................102
CUSTOMER SUPPORT ..................................................................................................................................102
TROUBLESHOOTING ....................................................................................................................................103
APPENDIX A: PRODUCT SPECIFICATIONS.....................................................................................105
SPECIFICATIONS..........................................................................................................................................105
ENVIRONMENTAL SPECIFICATIONS..............................................................................................................106
ELECTRICAL SPECIFICATIONS .....................................................................................................................106
PHYSICAL SPECIFICATIONS .........................................................................................................................107
APPENDIX B: MODEL CODE .................................................................................................................108
VARIANT (X) ..............................................................................................................................................108
GAS IDENTIFICATION (YYY)......................................................................................................................108
FULL SCALE RANGE (SCCM NITROGEN) (ZZZ)...........................................................................................110
FITTINGS (C)...............................................................................................................................................111
INTERFACE (A) ...........................................................................................................................................111
SEAL MATERIAL (E) ...................................................................................................................................111
EXTRAS/ OPTIONS (O).................................................................................................................................111
APPENDIX C: GAS CORRECTION FACTORS...................................................................................112
APPENDIX D: CE DECLARATION OF CONFORMITY....................................................................115
MKS WORLDWIDE CALIBRATION & SERVICE CENTERS ..........................................................116
There is a declaration of contamination on the last page of this instruction manual.
List of Figures
Figure 1 Model Code Label .............................................................................................................. 16
Figure 2 Side View - Dimensions (for 4 VCR, Sub D Connector and “single-part-body”) ............... 19
Figure 3 Front View – Dimensions (4 VCR) ..................................................................................... 20
Figure 4 Top View – Dimensions ..................................................................................................... 20
Figure 5 Bottom View – Dimensions ............................................................................................... 21
Figure 6 Connector and Control Elements for Profibus unit ........................................................... 21
Figure 7 Side view - Dimensions (DN 16 KF, Sub D connector and "single-part-body")................. 21
Figure 8 Zero Button......................................................................................................................... 25
Figure 9 Profibus Connector ............................................................................................................ 55

MKS MF1 Specifications

General

Brand	MKS
Model	MF1
Category	Controller
Language	English