Data sheet
110 / 112 28.03.2022
Measuring characteristics
Term Value Unit
Measuring time 20 to 600 s
Leak-tightness limit
(unit selectable: µg/min, mm
3
/min, µl/min)
10 to 999 µg/min
Measuring resolution 0.01 µm
Deformation: Resolution 0.01 μm -500 to 1200 µm
Ambient conditions
Term Value Unit
Temperature 15 to 35 °C
Relative humidity (non-condensing) max. 80 %
Emissions
Term Value Unit
Noise emissions <75 dB(A)
Noise emissions for "Quiet pressure release"
See Quiet pressure release [}Page84].
<68 dB(A)