12-18
IM 01E30D01-01EN
<12. OUTLINE>
●LayLengthCode2,AXR080-AXR100,WaferType
Unit: mm (approx. inch)
F1216.ai
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
*2: Depending on the selection of grounding ring code and optional code, add the following
value to “L” (face-to-face length).
AXR080
AXR100
G
C
1 A 1 A 2
Hi
Max.
Height
Weight kg (lb)
Height
H1
Width
W
Size code
Size
Lining code
Face-to-
face length
080
80
(3)
A
160
(6.30)
129
(5.08)
77
(3.03)
129
(5.08)
157
(6.18)
319
(12.54)
6.5
(14.4)
100
100
(4)
A
180
(7.09)
155
(6.10)
102
(4.02)
155
(6.10)
183
(7.02)
345
(13.56)
8.9
(19.6)
L
*
2
Outside
dia.
øD
Inter diameter of
Grounding ring
ød
18.5(0.73)
90(3.54)
164
(6.46)
*1
33
*1
(1.30)
L
*2
154
(6.06)
28
(1.10)
33
(1.30)
70(2.76)
W
Hi
H1
73
(2.87)
49
(1.93)
Ground Terminal
(M4)
ø
D
ø
(d)
ø128 (5.04)
Grounding Ring Code S, L, H P, T N
None +0 +22 (0.87) -2 (0.08)
GA, GC, GD
(Special Gaskets)
+8 (0.31) +26 (1.02)
–
Optional
Code
●LayLengthCode2,AXR150-AXR200,WaferType
Unit: mm (approx. inch)
F1217.ai
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
*2: Depending on the selection of grounding ring code and optional code, add the following
value to “L” (face-to-face length).
AXR150 G
AXR200 C
1 A 1 A 2
Hi
Max.
Height
Weight kg (lb)
Height
H1
Width
W
Size code
Size
Lining code
Face-to-
face length
150
150
(6)
A
230
(9.06)
202
(7.95)
140.7
(5.54)
220
(8.66)
243
(9.57)
405
(15.93)
19.3
(42.5)
200
200
(8)
A
300
(11.81)
252
(9.92)
188.9
(7.44)
272
(10.71)
293
(11.54)
455
(17.89)
28.2
(62.2)
L
*
2
Outside
dia.
øD
Inter diameter of
Grounding ring
ød
33
*1
(1.30)
28
(1.10)
33
(1.30)
ø128 (5.04)
Grounding Ring Code S, L, H P, T N
None +0 +28 (1.1) -6 (0.24)
GA, GC, GD
(Special Gaskets)
+2 (0.08) +30 (1.18)
–
Optional
Code
Hi
49 (1.93)
73 (2.87)
H1
L
18.5 (0.73)
164
(6.46)
Ground Terminal
(M4)
*1
W
ø
D
ø
(d)
154 (6.06)
90 (3.54)
70(2.76)
*2
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