12-17
IM 01E30D01-01EN
<12. OUTLINE>
●LayLengthCode2,AXR025,WaferType
F1214.ai
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
*2: Depending on the selection of grounding ring code and optional code, add the following
value to “L” (face-to-face length).
AXR025
G
C
1 A 1 A 2
Unit: mm (approx. inch)
Hi
Max.
Height
Weight kg (lb)
Height
H1
Width
W
Size code
Size
Lining code
Face-to-
face length
025
25 (1)
A
93
(3.66)
67.5
(2.66)
28
(1.10)
74.5
(2.93)
92
(3.62)
253.5
(9.98)
3.6
(7.8)
L
*
2
Outside
dia.
øD
Inter diameter of
Grounding ring
ød
164 (6.46)
*1
33
*1
(1.30)
L
*2
154 (6.06)
28
(1.10)
33
(1.30)
70(2.76)
W
Hi
H1
73
(2.87)
49
(1.93)
Ground Terminal
(M4)
ø
D
(
ø
d)
ø128 (5.04)
Grounding Ring Code S, L, H P, T N
None +0 +22 (0.87) -2 (0.08)
GA, GC, GD
(Special Gaskets)
+8 (0.31) +26 (1.02)
–
Optional
Code
18.5(0.73)
90(3.54)
●LayLengthCode2,AXR040-AXR065,WaferType
Unit: mm (approx. inch)
F1215.ai
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in
the figure.
*2: Depending on the selection of grounding ring code and optional code, add the
following value to “L” (face-to-face length).
AXR040
AXR050
AXR065
G
C
1 A 1 A 2
Hi
Max.
Height
Weight kg (lb)
Height
H1
Size code
Size
Lining code
Face-to-
face length
040
40
(1.5)
A
106
(4.17)
86
(3.39)
41
(1.61)
86
(3.39)
111
(4.37)
273
(10.73)
4.1
(9.1)
050
50
(2)
A
120
(4.72)
99
(3.90)
53
(2.09)
99
(3.90)
129
(5.08)
291
(11.44)
4.8
(10.7)
065
65
(2.5)
A
120
(4.72)
117
(4.61)
66
(2.60)
117
(4.61)
147
(5.79)
309
(12.17)
5.4
(11.9)
L
*
2
Outside
dia.
øD
Width W
Inter diameter of
Grounding ring
ød
164
(6.46)
*1
33
*1
(1.30)
W
28
(1.10)
33
(1.30)
70(2.76)
øD
(
ø
d)
ø128 (5.04)
Terminal
(M4)
Ground
L
*2
154
(6.06)
Hi
H1
73
(2.87)
49
(1.93)
Grounding Ring Code S, L, H P, T N
None +0 +22 (0.87) -2 (0.08)
GA, GC, GD
(Special Gaskets)
+8 (0.31) +26 (1.02)
–
Optional
Code
18.5(0.73)
90(3.54)
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