12-16
IM 01E30D01-01EN
<12. OUTLINE>
12.7 EXTERNAL DIMENSIONS
●LayLengthCode1,AXR080-AXR100,WaferType
F1212.ai
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
*2: Depending on the selection of grounding ring code and optional code, add the following
value to “L” (face-to-face length).
AXR080
AXR100
G
C
1 A 1 A 1
Hi
Max.
Height
Weight kg (lb)
Height
H1
Size code
Size
Lining code
Face-to-
face length
080
80
(3)
A
120
(4.72)
129
(5.08)
77
(3.03)
129
(5.08)
157
(6.18)
319
(12.54)
5.8
(12.8)
100
100
(4)
A
150
(5.91)
155
(6.10)
102
(4.02)
155
(6.10)
183
(7.20)
345
(13.56)
8.1
(17.9)
L
*
2
Outside
dia.
øD
Inter diameter of
Grounding ring
ød
Width
W
Unit: mm (approx. inch)
28
(1.10)
70
(2.76
)
18.5(0.73)
W
33
(1.30)
73
(2.87)
49
(1.93)
154(6.06)
90(3.54)
ø
128(5.04)
164 (6.46)
H1
Hi
L
*2
Ground Terminal
(M4)
ø
D
ø
(d)
33
(1.30)
*1
Grounding Ring Code S, L, H P, T N
None +0 +26 (1.02) -2 (0.08)
GA, GC, GD
(Special Gaskets)
+8 (0.31) +30 (1.18)
–
Optional
Code
●LayLengthCode1,AXR150-AXR200,WaferType
F1213.ai
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
*2: Depending on the selection of grounding ring code and optional code, add the following
value to “L” (face-to-face length).
Hi
Max.
Height
Weight kg (lb)
Height
H1
Size code
Size
Lining code
Face-to-
face length
150
150
(6)
A
200
(7.87)
202
(7.95)
146.1
(5.75)
220
(8.66)
243
(9.57)
405
(15.93)
15.9
(35.1)
200
200
(8)
A
250
(9.84)
252
(9.92)
193.6
(7.62)
272
(10.71)
293
(11.54)
455
(17.89)
23.5
(51.8)
L
*
2
Outside
dia.
øD
Inter diameter of
Grounding ring
ød
Width
W
Unit: mm (approx. inch)
W
ø
D
ø
(d)
154 (6.06)
90 (3.54)
49
(1.93)
73
(2.87)
H1
L
Hi
28
(1.10)
33
(1.30)
70
(2.76
)
33
(1.30)
18.5(0.73)
ø
128
(
ø
5.04)
164 (6.46)
Ground Terminal
(M4)
*1
*1
*2
Grounding Ring Code S, L, H P, T N
None +0 +32 (1.26) -2 (0.08)
GA, GC, GD
(Special Gaskets)
+10 (0.39) +38 (1.5)
–
Optional
Code
AXR150 G
AXR200 C
1 A 1 A 1
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