Orbotech SPTS Xactix e1 Series - Bottle and Valve Leak Check for Bottle

Manual Version e1-4.3.0.ae-R3. Page
111
6.17.2 Bottle and valve leak check for bottle
Step Number Step
Completed
(Initials)
Notes
6.17.2.1 Go to maintenance menu if not
already there
6.17.2.2 Make sure the valve on the
bottle is open
6.17.2.3 Open V5, V4, and V1 and pump
down for 1 minute.
6.17.2.4
Close V4
6.17.2.5 Monitor the pressure in
expansion chamber 1, writing
down the pressure readings
every minute, it should initially
quickly rise, the level off to a
stable pressure typically
between 2 and 12 Torr within
10 minutes. If the expansion
chamber pressure continues to
rise at more than 0.02
Torr/minute beyond this point
then there may be a leak,
otherwise, the bottle and line
are considered to be leak tight.
Continue to watch the pressure
rise for a total of 30 minutes for
signs of the leak slowing down.
Email these results to
support@xactix.com .
01min:
02min:
03min:
04min:
05min:
06min:
07min:
08min:
09min:
10min:
11min:
12min:
13min:
14min:
15min:
16min:
17min:
18min:
19min:
20min:
6.17.2.6 If there is a large leak, then it is
probably at the connection
between the valve and the
bottle. Close the main bottle
valve, open V1, V4, and V5 and
pump for 10 minutes. Close the
valves and remove the bottle.
Try to tighten the valve into the
bottle. If some tightening is
possible, reinstall and re-run
the above test starting at Step
6.17.2.1. If not, then the XeF2
vendor should be contacted so
that they can fix the problem.