Manual Version e1-4.3.0.ae-R3. Page
5.6 Main Chamber Purge
To repeatedly pump and purge the main chamber to remove residual gas or water vapor, the Chamber
Purge Utility can be used. First, set the parameters for the purge routine, including N2 fill high-pressure,
high-pressure time, pump-down low pressure, low-pressure time, and number of purge cycles. Then
press, “Start” to start the cycle. At any time, the “Cancel” button can be used to end the routine and
return to the Maintenance Menu.
5.7 Pressure Sensor Recalibration Utility
The pressure sensors may “drift” over time indicating less accurate readings. The gauge recalibration
utility is a method to periodically recalibrate them. To recalibrate the sensors, set the number of purge
cycles, length of pump time, and assumed chamber base pressure. The manometers are zero
calibrated to .05 T or 50 mT, which is the assumed base pressure of the system. Pressing the
“Calibration History” button accesses a log file for the recalibration function. The “Set Defaults” button
can be used to save recalibration settings for easy one-touch use. Set the preferred settings and press
“Set Defaults”, this will allow these parameters to be saved and appear each time calibration is
performed unless otherwise set. When desired parameters are set press “Start Test” button and
calibration will begin. Occasionally executing the calibration a second time may be needed to achieve
calibration. An automatic calibration function may be set to “True” in the configuration menu under
“System Configuration”. This function will automatically recalibrate the capacitance manometers at a
low-usage time, typically at night. The last calibration time is then displayed on the main menu.
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