Orbotech SPTS Xactix e1 Series - Dismantling, Demolition; Storage and Transport; Dismantling and Demolition; Storage; Storage in the Clean Room

Manual Version e1-4.3.0.ae-R3. Page
114
8 Dismantling, demolition; storage and transport
8.1 Dismantling and demolition
Before dismantling or demolishing your Xactix e1 system please contact SPTS customer support for
assistance.
8.2 Storage
8.2.1 Storage in the clean room
It is strongly recommended that the Xactix e1 be left on and running unless it will not be used for an
extended period of tiem. For storage in the clean room or laboratory follow the instruction to close the
XeF
2
cylinder and turn off the system in Section 6.1
8.3 Storage and transport
Contact SPTS customer support for assistance in preparing the tool for longer term storage. For
storage outside the clean room and for transport Your Xactix e1 system should be stored and
transported in its original crate and packaging. The system should be double wrapped and vacuum
packed with desiccant.