Orbotech SPTS Xactix e1 Series - Main Chamber Leak Check

Manual Version e1-4.3.0.ae-R3. Page
112
6.18 Main Chamber Leak Check
If a main chamber leak is suspected, perform the following sequence of tests. Most apparent leaks are
actually trapped gas in the showerhead and are not usually leaks.
Step Number Step
Completed
(Initials)
Notes
6.18.1 Using the Maintenance Menu
(see Section 5.4
), Open V10 for
30 minutes
6.18.2
Close V10
6.18.3 Wait for 2 hours. If the
pressure in the main chamber
does not exceed 10 Torr, the
chamber is considered to be
leak tight.
6.18.4 If the main chamber is exceeds
this pressure, check that there
is no debris on the main o-ring
on the chamber. If any debris
is found, remove the debris and
rerun the test start at step
6.18.1. Contact SPTS at
support@xactix.com if this does
not address the problem.