Manual Version e1-4.3.0.ae-R3. Page
ALL VENTILATION CONN
SUFFICIENTLY INDEPEN
VENTILATION SYSTEM FAILURE DOES NOT ALLO
EFFLUENTS DISCHARGING INTO THE SYSTEM OR
TOWARDS THE OPERATOR
CONNECTION MUST CONF
ORM WITH ALL LOCAL
REQUIREMENTS.
4.1.8 Installation Material
• Electrical connectors as required for local electrical outlets
• Overpressure relief valves in the Nitrogen process gas lines to prevent the process Nitrogen
gasses from exceeding 100 psi at the rear system connections
• Gas regulator for Nitrogen gas box purge gas (some systems do not require this purge, please
contact SPTS for more information)
• Gas cylinder mounting bracket bench mount, or wall mount (if using gas cylinder)
• Gas box exhaust hose
• Chamber shroud exhaust hose
• Vacuum pump exhaust tubing - stainless steel recommended
• One XeF
2
cylinder for e1 Series with XeF
2
ANY DEVIATION FROM THESE INSTALLATION AND
SAFETY REQUIREMENTS MAY CAUSE DETERIORATION IN
THE E1 SERIES PERFORMANCE AND/OR DANGEROUS
OPERATION.
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