Orbotech SPTS Xactix e1 Series - Table of Contents

TABLE OF CONTENTS
1 TECHNICAL SPECIFICATIONS…………………………………………………………………………. 4
2 PRECAUTIONS AND SAFETY INSTRUCTIONS………………………………………………………. 6
2.1 General Safety 6
2.2 Personal Protective Equipment (PPE) 6
2.3 Mechanical Safety 7
2.4 Compressed Air 8
2.5 Electrical Safety 8
2.5.1 Live Works 9
2.6 Gas Safety 9
2.6.1 General 10
2.6.2 Discovering a Gas Leak 10
2.6.3 Treatment of Exhaust Gases 10
2.7 Contamination 11
2.8 Gas Lines (Toxic & Non-Toxic) 11
2.9 Hazardous Substances 12
2.9.1 Working with Hazardous Substances 12
2.9.2 Spillage of Hazardous Substances 12
2.10 Additional Safety Notes 13
2.11 System Cleaning 13
2.12 Unintended & Intended Releases 13
3 DESCRIPTION OF THE PRODUCT; COMPOSITION OF THE PRODUCT…………………………14
4 ASSEMBLY; INSTALLATION; FIRST OPERATION………………………………………………….. 16
4.1 Preparation 16
4.1.1 General Requirements of the Site 16
4.1.2 Dimensions and Weights 16
4.1.3 Space Requirements 17
4.1.4 Electrical Services Required 18
4.1.5 General Ambient Temperatures 18
4.1.6 Gas Requirements 19
4.1.7 Exhaust Requirements 20
4.1.8 Installation Material 21
4.2 Pre-Installation Checklist 22
4.3 Cylinder and valve for XeF2 23
4.4 Uncrating 24
4.4.1 Receiving the System 24
4.4.2 Storing the System Before Installation 24
4.5 Uncrating the System 25
4.6 Setup 28
4.7 Initial Start-up 39
4.7.1 Safety verification 39
4.7.2 Power Up and EMO reset 39
5 DESCRIPTION OF OPERATION; METHOD OF USE………………………………………………… 42
5.1 e1 Series Log in 43
5.2 Main menu 44