Manual Version e1-4.3.0.ae-R3. Page
5.2.1 Sample Loading 44
5.2.2 Viewing the Log 48
5.2.3 Other Main Menu items 52
5.3 Software operation details 53
5.3.1 Recipe Storage 53
5.3.2 Recipe Manager 53
5.3.3 Performing an Etch 54
5.3.4 Etch Menu Features 55
5.3.5 Performing an Etch in the Normal Mode 57
5.3.6 Performing an Etch in the Normal with Delays Mode 59
5.3.7 Performing an Etch in the Advanced Normal Mode 60
5.3.8 Performing an Etch in the High Conductivity Mode 62
5.4 Maintenance Menu 64
5.4.1 Viewing the Full Log 65
5.4.2 User Manager 69
5.4.3 Configuration Menu 72
5.4.4 System Configuration Menu 73
5.4.5 Startup Configuration Menu 74
5.4.6 Standby Configuration Menu 76
5.4.7 Gas Bottle Change Parameters Menu 77
5.4.8 Etch Configuration Menu 78
5.5 Leak-Back Utility 82
5.6 Main Chamber Purge 83
5.7 Pressure Sensor Recalibration Utility 83
6 MAINTENANCE AND MAINTENANCE SCHEDULE………………………………………………….. 85
6.1 Shutting Down 85
6.2 Electrical and Gas Disconnect and Lockout / Tagout 85
6.2.1 Electrical Disconnect 85
6.2.2 Gas Supply Disconnect and Lockout / Tagout 86
6.2.3 Panel Layouts 87
6.3 Turning on the System after Maintenance 87
6.4 Procedures and Schedules 88
6.4.1 Maintenance Procedures 88
6.4.2 Regular Inspection 88
6.5 Recommended Spare Parts 88
6.6 XeF
2
Bottle Change 88
6.6.1 Bottle Change General information 88
6.6.2 Changing XeF2 Bottle 89
6.6.3 Completing Bottle Change 95
6.7 Adjusting Nitrogen Flow Rates 96
6.7.1 Main Chamber 96
6.7.2 Expansion Chamber 96
6.8 Roughing Pump 96
6.9 Chamber/Lid Cleaning 96
6.10 Showerhead Replacement 97
6.11 Showerhead hole plugs 97
6.12 Gas Box Heater 98
6.13 Vacuum Interlocks 100
6.13.1 Chamber interlock 100
6.13.2 Vacuum interlock 100
6.14 Manual valve operation 102
6.15 Ventilation shroud interlock 103
6.16 System startup through Normal issues 104
6.17 XeF
2
Bottle/Valve/Fitting Leak 109
6.17.1 Leak check bottle #1 connection and NPT to VCR adapter 109
6.17.2 Bottle and valve leak check for bottle 111
To Next Page
Loading...