Manual Version e1-4.3.0.ae-R3. Page
6.18 Main Chamber Leak Check 112
7 DECOMMISSIONING…………………………………………………………………………………….. 113
8 DISMANTLING, DEMOLITION; STORAGE AND TRANSPORT…………………………………… 114
8.1 Dismantling and demolition 114
8.2 Storage 114
8.2.1 Storage in the clean room 114
8.3 Storage and transport 114
9 BREAKDOWNS AND REPAIRS……………………………………………………………………….. 115
9.1 What to do in case of a problem. 115
9.2 Contacting Customer Support 115
10 DISCARD…………………………………………………………………………………………………...116
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