Orbotech SPTS Xactix e1 Series - Additional Safety Notes; System Cleaning; Unintended & Intended Releases

Manual Version e1-4.3.0.ae-R3. Page
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2.10 Additional Safety Notes
To maintain cleanliness within the vacuum system and to prevent contamination, corrosion, and reduce
particulate levels; consideration must be given to preventing air from coming into contact with gases or
process by-products in the vacuum system. This can be achieved by means of nitrogen purging, for
example.
2.11 System Cleaning
You must perform a successful unload procedure to open the chamber (see section 5.2.1 which will
perform pump purges and vents).
• Cleaning the wafer holder and chamber must be done using Texwipe TX1086 or TX1046 or
equivalent cleanroom wipes (6% IPA + 94% DI Water pre-wetted wipes). Over time, the
showerhead will become cloudy but wiping does not generally make a difference and should be
replaced if maintaining optical clarity is important.
• During the cleaning procedures, contaminated particulate material will be created. All
appropriate safety precautions must be observed for this kind of hazard. Ensure that
contaminated material is disposed of in accordance with appropriate site policy and
procedures.
• Cleanroom wipes and abrasives will become contaminated during cleaning procedures. Ensure
that contaminated wipes and abrasives are placed inside a clearly labelled bag and disposed of
in accordance with appropriate site policy and procedures.
2.12 Unintended & Intended Releases
The system is designed to operate at negative pressures, consequently any leaks will usually be ‘in to’
not ‘out of’ the system. These ingresses will therefore be pumped away by the pumping system to the
customer’s Local Exhaust Ventilation (LEV) system.
The system does not produce intentional releases. After processing, all waste products are pumped
away by the pumping system to the customer’s Local Exhaust Ventilation (LEV) system. The by-
products of using XeF
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may include hydrogen fluoride and other fluorine compounds. Because of this,
SPTS recommend that a local gas detection system should be fitted to the tool with sensor located in
pipework medially after the gasbox extract bulkhead. It is recommended that the detector should be F
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detection with a Fluorine/Oxidizer sensor. Area sensors near the tool are also recommended.