Orbotech SPTS Xactix e1 Series - Maintenance and Maintenance Schedule; Shutting down; Electrical and Gas Disconnect and Lockout; Tagout; Electrical Disconnect

Manual Version e1-4.3.0.ae-R3. Page
85
6 Maintenance and Maintenance Schedule
WARNING
SERVICE AND MAINTENA
NCE SHOULD ONLY BE
PERFORMED TO THOSE INDIVIDUALS WHO UNDE
RSTAND
THE RISKS OF EXPOSURE TO XEF2 AND ARE FU
LLY
TRAINED IN THE MAINTENANCE ACTIVITIES FO
R THE
SYSTEM.
6.1 Shutting Down
It is strongly recommended that the Xactix e1 be left on and running unless it will not be used for an
extended period of time. All of the recommended regular maintenance and inspections procedures do
not require the system to be shut down. However in the case of any work being done in which the user
ascertains that there is a danger from electrical shock or pressurized gasses, the system should be
shut down as follows.
If the proposed procedure will require access to any area of the system which has been exposed to the
XeF2 gas then:
1. Close the valve on the source cylinder.
2. Follow the instructions for checking for a leak in the cylinder valve as outlined in steps 4-8
in section 6.17.2. Should this test fail contact SPTS customer support.
3. In the maintenance menu manually open all valves except valves 11, 8 and 9 and let the
system pump down for one hour. For instructions on how to manually actuate the valves
see section 6.14.
4. Return to the main menu
To turn off the system:
1. Logout of the system.
2. Press the shutdown button on the login screen,
3. Turn off the system by pressing the main system off button as shown in Figure 28.
4. Turn off the monitor using its power button.
6.2 Electrical and Gas Disconnect and Lockout / Tagout
6.2.1 Electrical Disconnect
When working on the system the user should ascertain if the task may involve a chance of electrical
shock or any contact with live electrical circuits. If this is the case electrical power should be removed
from the system by unplugging the system. Be sure to wait at least 1 minute after unplugging the
system before performing any tasks on the system to be sure any stored electrical energy in the system
dissipates.
To ensure that power is removed from the system and cannot be accidentally energized, a Lock-out /
Tag-out procedure should be used. To perform a Lockout / Tagout, it is recommended to place an
electrical plug lockout and tagout (see Figure 35) on the system’s electrical power plug (from the Power
Controller Box, Figure 15).