Orbotech SPTS Xactix e1 Series - Changing Xef2 Bottle

Manual Version e1-4.3.0.ae-R3. Page
89
6.6.2 Changing XeF2 Bottle
WARNING
IT IS IMPERATIVE THAT THESE DIRECTIONS B
E
FOLLOWED EXACTLY TO SAFELY CHANGE THE XE
NON
DIFLUORIDE BOTTLE. USE THE PPE DESCRIBE
D IN
SECTION 2.2.
Beginning from the Main Menu screen, click on Maintenance Menu.
To change the gas bottle click on the top right button, Change XeF
2
bottle, shown in Figure 39.