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Details system physical characteristics, control capabilities, safety features, and available optional components.
Specifies key performance indicators such as etch rate range, wafer-to-wafer uniformity, and run-to-run repeatability.
Outlines general safety rules and required personal protective equipment for system operation and maintenance.
Covers safety protocols for mechanical, electrical, compressed air, hazardous gases, and substances.
Provides guidance on system cleaning procedures and handling unintended or intended releases of materials.
Details site requirements, dimensions, utilities, gas, and exhaust connections for system installation.
Covers pre-installation checks, cylinder handling, and procedures for uncrating and storing the system.
Provides step-by-step instructions for system setup, connections, and the initial power-up and startup procedure.
Guides users through the login process and overview of the main menu interface for system operation.
Explains how to load/unload samples and how to view system logs and process data.
Details software features for recipe management, etch modes, and performing etch cycles.
Covers system configuration, maintenance menus, diagnostic utilities, and parameter settings.
Provides procedures for safely shutting down the system and disconnecting power and gas supplies.
Outlines recommended maintenance tasks, inspection schedules, and lists essential spare parts.
Details the process for changing XeF2 bottles and adjusting nitrogen flow rates for optimal performance.
Covers maintenance for pumps, showerheads, heaters, and explains vacuum interlock functions.
Provides procedures for leak checking, addressing startup problems, and diagnosing common system issues.
Offers guidance on handling system breakdowns and contacting customer support for assistance.
General| Brand | Orbotech |
|---|---|
| Model | SPTS Xactix e1 Series |
| Category | Laboratory Equipment |
| Language | English |
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