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SPTS Xactix e1 Series
Orbotech SPTS Xactix e1 Series User Manual
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Manual Ver
sion e1
-
4.3.
0.ae
-R3
(201
5/
04)
Xactix
®
e1
Series S
ystem Manual
2
Table of Contents
Table of Contents
3
Technical Specifications
6
Precautions and Safety Instructions
8
General Safety
8
Personal Protective Equipment (PPE)
8
Mechanical Safety
9
Compressed Air
10
Electrical Safety
10
Live Works
11
Gas Safety
11
General
12
Discovering a Gas Leak
12
Treatment of Exhaust Gases
12
Contamination
13
Gas Lines (Toxic & Non-Toxic)
13
Hazardous Substances
14
Working with Hazardous Substances
14
Spillage of Hazardous Substances
14
Additional Safety Notes
15
System Cleaning
15
Unintended & Intended Releases
15
Description of the Product; Composition of the Product
16
Assembly; Installation; First Operation
18
Preparation
18
General Requirements of the Site
18
Dimensions and Weights
18
Space Requirements
19
Electrical Services Required
20
General Ambient Temperatures
20
Gas Requirements
21
Exhaust Requirements
22
Installation Material
23
Pre-Installation Checklist
24
Cylinder and Valve for Xef2
25
Uncrating
26
Receiving the System
26
Storing the System before Installation
26
Uncrating the System
27
Setup
30
Initial Start-Up
41
Safety Verification
41
Power up and EMO Reset
41
Description of Operation; Method of Use
44
E1 Series Log in
45
Main Menu
46
Sample Loading
46
Viewing the Log
50
Other Main Menu Items
54
Software Operation Details
55
Recipe Storage
55
Recipe Manager
55
Performing an Etch
56
Etch Menu Features
57
Performing an Etch in the Normal Mode
59
Performing an Etch in the Normal with Delays Mode
61
Performing an Etch in the Advanced Normal Mode
62
Performing an Etch in the High Conductivity Mode
64
Maintenance Menu
66
Viewing the Full Log
67
User Manager
71
Configuration Menu
74
System Configuration Menu
75
Startup Configuration Menu
76
Standby Configuration Menu
78
Gas Bottle Change Parameters Menu
79
Etch Configuration Menu
80
Leak-Back Utility
84
Main Chamber Purge
85
Pressure Sensor Recalibration Utility
85
Maintenance and Maintenance Schedule
87
Shutting down
87
Electrical and Gas Disconnect and Lockout / Tagout
87
Electrical Disconnect
87
Gas Supply Disconnect and Lockout / Tagout
88
Panel Layouts
89
Turning on the System after Maintenance
89
Procedures and Schedules
90
Maintenance Procedures
90
Regular Inspection
90
Recommended Spare Parts
90
Xef 2 Bottle Change
90
Bottle Change General Information
90
Changing Xef2 Bottle
91
Completing Bottle Change
97
Adjusting Nitrogen Flow Rates
98
Main Chamber
98
Expansion Chamber
98
Roughing Pump
98
Chamber/Lid Cleaning
98
Showerhead Replacement
99
Showerhead Hole Plugs
99
Gas Box Heater
100
Vacuum Interlocks
102
Chamber Interlock
102
Vacuum Interlock
102
Manual Valve Operation
104
Ventilation Shroud Interlock
105
System Startup through Normal Issues
106
Xef 2 Bottle/Valve/Fitting Leak
111
Leak Check Bottle #1 Connection and NPT to VCR Adapter
111
Bottle and Valve Leak Check for Bottle
113
Main Chamber Leak Check
114
Decommissioning
115
Dismantling, Demolition; Storage and Transport
116
Dismantling and Demolition
116
Storage
116
Storage in the Clean Room
116
Storage and Transport
116
Breakdowns and Repairs
117
What to Do in Case of a Problem
117
Contacting Customer Support
117
Discard
118
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Orbotech SPTS Xactix e1 Series Specifications
General
Brand
Orbotech
Model
SPTS Xactix e1 Series
Category
Laboratory Equipment
Language
English
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