EasyManua.ls Logo

Orbotech SPTS Xactix e1 Series - Gas Requirements

Default Icon
118 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
Manual Version e1-4.3.0.ae-R3. Page
19
WARNING
ANY INTERRUPTION OF THE EARTH CONNEC
TION INSIDE
OR OUTSIDE THE E1 SERIES IS LIKELY TO MAKE TH
E
UNIT DANGEROUS. THE SAFETY EARTH CONNECT
ION
SHOULD FULFILL ALL LOCAL SAFETY REQUIREM
ENTS.
ENSURE THAT THIS IS CHECKED DURING THE PRE-
INSTALLATION SITE CHECK.
4.1.6 Gas Requirements
At a minimum, one cylinder of nitrogen gas containing a minimum of 40 cubic feet of gas must
be available during installation. Utilizing a wall- or bench-mounted support bracket, this cylinder
should be firmly secured to prevent possible damage or explosion of the cylinder and/or
cylinder valve. The customer must also provide a suitable pressure regulator (Matheson MA-18
or equivalent) with a shut-off valve for the process gas supply.
A source of clean dry air, compressed to 70-100 psi is required for operation of the pneumatic
valves. The customer must provide a suitable pressure regulator with shut-off valve for the CDA
supply.
One standard cylinder filled with xenon difluoride, (not included with the e1 Series), should also
be available for installation within the system. A schematic of a typical cylinder can be found on
page 23.
Flow
Nitrogen
4 l/min (max)
Clean Dry Air (CDA)
1 l/min (max)
Vacuum
>4.5 m
3
/hr

Table of Contents