Orbotech SPTS Xactix e1 Series - Xef 2 Bottle;Valve;Fitting Leak; Leak Check Bottle #1 Connection and NPT to VCR Adapter

Manual Version e1-4.3.0.ae-R3. Page
109
6.17 XeF
2
Bottle/Valve/Fitting Leak
If a leak at the bottle, the valve, or the fitting is suspected, follow the procedures in this Section. See
Figure 53 for possible leak areas that are described in this Section. Note that newer bottles have a
welded VCR fitting which virtually eliminates failure area 1 below. Furthermore, diaphragm valves are
also now being used which are much less likely to have leaks inside of the valve itself.
Angle Pattern Valve
Figure 53. Possible leak areas. Item 1 is the connection between the ¼” NPT to
VCR adapter and Item 2 is the connection between the bottle valve and the bottle.
6.17.1 Leak check bottle #1 connection and NPT to VCR adapter
Step Number Step
Completed
(Initials)
Notes
6.17.1.1 Using the Maintenance Menu
(see Section 5.4
), Open V4 for
10 minutes
6.17.1.2
Close V4
6.17.1.3 Wait 25 minutes. If the
pressure in the expansion
chamber does not rise by more
than 0.2 Torr over this period
then the expansion chamber is
considered to be leak tight. If it
does exceed this pressure
change, there may be a leak in
the expansion chamber.
6.17.1.4 Close the manual valve on the
XeF2 bottle.
6.17.1.5
Open valves 4, 5 and 1
6.17.1.6 Wait 5 minutes to complete
pump down.
6.17.1.7
Close V4.
2
1