EasyManua.ls Logo

Orbotech SPTS Xactix e1 Series - Hazardous Material and Gas Safety

Default Icon
118 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
Manual Version e1-4.3.0.ae-R3. Page
7
CAUTION
Air Sampling Checks: Before breaking seals and
undertaking air sampling checks, full Personal Protective
Equipment must be worn including a respirator. The
immediate area must be well ventilated. All non-
essential
personnel must be evacuated to a safe area and air
sampling warning notices must be displayed in the
immediate vicinity. When undertaking air sampling tests,
checks must be made to ascertain the concentration of
residual gases and hazardous by-
product gases such as
XeF
2
and HF.
CAUTION
Safety Goggles: It is recommended that maintenance
personnel wear safety goggles that conform to the current
local safety standards or minimally to BS EN 166 and/or
ANSI Z87.1.
2.3 Mechanical Safety
CAUTION
XeF
2
: When the system cannot be vented, there are strict
procedures that must be followed and full PPE suitable for
dealing with XeF
2
and its by-
products must be worn. Please
refer to the MSDS for details on the PPE and contact SPTS
as soon as practicable for instruction.
CAUTION
Hazardous Gases/Materials: The gasbox
contains
equipment that may contain hazardous gases/materials.
Only SPTS approved technically qualified personnel who
are fully aware of all relevant safety precautions may open
the gasbox.

Table of Contents