Orbotech SPTS Xactix e1 Series - System Setup and Startup Sequence

Manual Version e1-4.3.0.ae-R3. Page
28
4.6 Setup
The installation process is described below. To begin the setup of the e1 Series, unpack all items from
the boxes, then:
Step Number
Step Details
Completed
1
Level the system using the leveling feet (Figure 10)
2 Setup the computer and plug into customer supplied electrical
outlet
3 Set up the display and plug its power supply into customer
supplied electrical outlet
4 Make display connection to computer, video connection (also
serial port if there is an optional touchscreen)
5
Install keyboard and make connections
6 Install vacuum connection on e1 Series to vacuum pump (see
Figure 11 and Figure 12)
7
Set vacuum pump ballast to open position (see Figure 13)
8
Connect vacuum pump to customer supplied exhaust
9 Connect e1 Series to power controller box (see Figure 14 and
Figure 16)
10 Connect e1 Series to computer through the DeviceNet cable (see
Figure 14 and Figure 17)
11 Connect power to pump from power controller box (see Figure
18), set pump power switch to ON position.
12 Connect customer supplied pressure relieved nitrogen line
(max. 100 psi) to process nitrogen connection (see Figure 19)
13 Connect customer supplied compressed dry air line to CDA
connection (see Figure 21)
14
Set internal nitrogen regulator to 10 psi (see Figure 20)
15
Set CDA regulator to 80 psi (see Figure 21)
16 Connect gas box exhaust to customer supplied exhaust (see
Figure 22)
17 Connect shroud exhaust to customer supplied exhaust (see
Figure 23)
18 Connect customer supplied nitrogen to gas box purge (see
Figure 19)
19
Insert showerhead stop (see Figure 24 and Figure 25)
20 Plug in power controller box into customer supplied electrical
outlet