Manual Version e1-4.3.0.ae-R3. Page
Log Low Level
Keeps track of all operating machine details in the full log.
Full Shutdown
Allows for the entire system to be shutdown when the Xetch software is shutdown.
Show warnings
Allows the system to display on-screen warnings. Such warnings include vacuum related warnings.
Automatic Gauge Recalibration
This feature allows the user to decide if and how often a gauge calibration will be executed
automatically.
Show Last Calibration Time
Enables system to display how long it has been since last gauge recalibration.
Default File Save Path
Allows the user to define a default folder that log files and images will be saved to.
Maximum Log Size
Maximum space allocated to the log for storage of log data. As the log exceeds this max size, the
oldest data is purged. Although it may be tempting to have large log files, they may prove to be difficult
to open in most text viewers.
Process Volume
Volume of process chamber. This should be set to 660 cm^3.
Expansion Ch. Volume
Volume of expansion chamber. This should be typically set to 558 cm^3.
Image Brightness
Red brightness, green brightness, and blue brightness settings (used only for the optional upgrade for
the image acquisition system).
Automatic Gauge Calibration Time
Sets the number of days between each automatic gauge calibration.
XeF2 Warning Level
If either XeF2 bottle’s estimated remaining XeF2 falls below this set point, a warning is displayed on the
Main and Etch menus, in addition, in the Maintenance menu, XeF2 usage is highlighted yellow if it is
below the setpoint.
5.4.5 Startup Configuration Menu
The startup parameters options screen is displayed on next page. Each of the options is briefly
explained.
Process Purge Cycles
Allows the user to set the number of purge cycles for the process chamber during the machine startup.
Process Purge High
Allows the user to set the nitrogen pressure for the process chamber purge cycles during the machine
startup.
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